Interlayer Dielectrics for Semiconductor Technologies (Record no. 152933)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00465nam a2200133Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 210420s2003 xx 000 0 und d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780125112215 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 978-0-12-511221-5 |
| 041 ## - LANGUAGE CODE | |
| Language code of text/sound track or separate title | eng |
| 245 ## - TITLE STATEMENT | |
| Title | Interlayer Dielectrics for Semiconductor Technologies |
| Statement of responsibility, etc. | S.P. Murarka, M. Eizenberg and A.K. Sinha |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Name of publisher, distributor, etc. | Academic Press |
| Date of publication, distribution, etc. | 2003 |
| 856 ## - ELECTRONIC LOCATION AND ACCESS | |
| Uniform Resource Identifier | <a href="https://www.sciencedirect.com/science/book/9780125112215">https://www.sciencedirect.com/science/book/9780125112215</a> |
| 906 ## - LOCAL DATA ELEMENT F, LDF (RLIN) | |
| n | Full text |
| o | Book |
| r | Non-Subscribed |
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