| 000 | 00485nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 210420s1998 xx 000 0 und d | ||
| 020 | _a9780123520654 | ||
| 020 | _a978-0-12-352065-4 | ||
| 041 | _aeng | ||
| 245 |
_aHandbook of Vacuum Science and Technology _cDorothy M. Hoffman, Bawa Singh, John H. Thomas III and John H. Thomas III |
||
| 260 |
_bAcademic Press _c1998 |
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| 856 | _uhttps://www.sciencedirect.com/science/book/9780123520654 | ||
| 906 |
_nFull text _oBook _rNon-Subscribed |
||
| 999 |
_c150662 _d150662 |
||