| 000 | 00478nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 210420s2020 xx 000 0 und d | ||
| 020 | _a9780128124543 | ||
| 020 | _a978-0-12-812454-3 | ||
| 041 | _aeng | ||
| 100 |
_aDaniel Lundin,Jon Tomas Gudmundsson andTiberiu Minea _910143 |
||
| 245 | _aHigh Power Impulse Magnetron Sputtering | ||
| 260 |
_bElsevier _c2020 |
||
| 856 | _uhttps://www.sciencedirect.com/science/book/9780128124543 | ||
| 906 |
_nFull text _oBook _rNon-Subscribed |
||
| 999 |
_c151098 _d151098 |
||