| 000 | 00457nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 210420s1981 xx 000 0 und d | ||
| 020 | _a9780444860958 | ||
| 020 | _a978-0-444-86095-8 | ||
| 041 | _aeng | ||
| 245 |
_aImpurity Doping Processes in Silicon _cF.F.Y. WANG |
||
| 260 |
_bElsevier _c1981 |
||
| 440 | _v2 | ||
| 856 | _uhttps://www.sciencedirect.com/science/bookseries/0167790X/2 | ||
| 906 |
_nFull text _oBook Series Volume _p0167790X _rNon-Subscribed |
||
| 999 |
_c152156 _d152156 |
||