| 000 | 00465nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 210420s2003 xx 000 0 und d | ||
| 020 | _a9780125112215 | ||
| 020 | _a978-0-12-511221-5 | ||
| 041 | _aeng | ||
| 245 |
_aInterlayer Dielectrics for Semiconductor Technologies _cS.P. Murarka, M. Eizenberg and A.K. Sinha |
||
| 260 |
_bAcademic Press _c2003 |
||
| 856 | _uhttps://www.sciencedirect.com/science/book/9780125112215 | ||
| 906 |
_nFull text _oBook _rNon-Subscribed |
||
| 999 |
_c152933 _d152933 |
||